Spin Coating Process – Tutorial Demo

DOE · PID Control · Cycle Animation · Defect Tracking

S1813 · 100mm Wafer
⚙️ Case Setup — Moderate / Bad Tuning
🌀 Final Speed
3 500 rpm
+500 above opt.
Optimal: 2 500–3 000 rpm
💧 Resin Volume
200 µL
+100 µL above opt.
Edge bead risk → high vol.
🌡 Temperature
24 °C
+2°C above opt.
Kp=1.0 Ki=0.1 Kd=0 — poor
💧 Humidity (RH)
55 %
+10% above opt.
Kp=4.5 Ki=1.8 Kd=0 — overtuned
Runs: 0 / 4  |  Conformity:
🎬 Spin Coating Cycle Animation
💧Deposit
3 s
Ramp
5 s
🌀Thinning
20 s
💨Drying
10 s
Waiting for demo… Cycle: 38 s
📋 Run Results — 4 Cycles
RUN #1
Pending…
RUN #2
Pending…
RUN #3
Pending…
RUN #4
Pending…
Run Speed
rpm
Volume
µL
Temp PV
/ SP (°C)
RH PV
/ SP (%)
Avg Thick.
(µm)
σ (µm) CV% Uniformity
(%)
Result
#13500200
#23500200
#33500200
#43500200
DETECTED DEFECTS
Non-Uniformity
Edge Bead
Striations
Comets
Voids
Dewetting
🔍 What Happened? Are you ready to lift the challenge?