🔬 Spin Coating Simulator - 50-Point Plotter

📖 Tutorial

ℹ️ Uniformity Measurement: 50 points across wafer surface

📋 Material Parameters

Material: Resin Quantity (µL):

⚙️ Speed Profile (4 Phases)

⚠️ Phase 1 must be ≥ 5 rpm!

Phase 1 - Deposit

Speed (rpm):

Time (s):

Phase 2 - Acceleration Ramp

From (rpm):

To (rpm):

Time (s):

Phase 3 - Speed Thinning

Speed (rpm):

Time (s):

Phase 4 - Final Drying

Speed (rpm):

Time (s):

⚙️ ENV CONTROL ⚙️

🌡️ TEMP

22.0°C

SP: °C

💧 RH

45%

SP: %

PID PARAMS

Kp: 4.0

Ki: 1.0

Kd: 0.0

🎬 ANIMATION — SPIN COATER PROCESS

0 RPM

⏱ 0.0 s

—

▪ Phase 1 · Deposit R : 0 → — mm

▪ Phase 2 · Ramp R : — → — mm

▪ Phase 3 · Thinning R : 50 mm ✓

▪ Phase 4 · Drying R : 50 mm ✓

⚙️ Simulation in progress...

Computing uniformity across 50 points...

📊 Uniformity Statistics (50 measurement points)

Avg Thickness (µm)

Std Dev σ (µm)

CV% (%)

Min (µm)

Max (µm)

Uniformity (%)

🔗 Temperature / Humidity Correlation

Scatter plot T° vs RH% — 50 measurements (ρ = −0.75)

📊 Statistics

ρ calculated : —

ρ theoretical : −0.75

Each point = 1 measurement on the wafer.
The negative correlation reflects psychrometric physics: when T↑, RH↓

ρ < −0.6 → Strong negative correlation
ρ < −0.3 → Moderate correlation
ρ ≥ −0.3 → Weak correlation

📊 Pareto — Defects Cumulative Run History

P1 DEPOSIT P2 RAMP P3 THINNING P4 DRYING

📏 Plotter - Thickness Measurement at 50 Points

100mm Wafer - 50-point grid (10 circles × 5 points)