🔬 Spin Coating Simulator - 50-Point Plotter

ℹ️ Uniformity Measurement: 50 points across wafer surface

📋 Material Parameters

Material: Resin Quantity (µL):

⚠️ Phase 1 must be ≥ 5 rpm!

Phase 1 - Deposit

Speed (rpm):

Time (s):

Phase 2 - Acceleration Ramp

From (rpm):

To (rpm):

Time (s):

Phase 3 - Speed Thinning

Speed (rpm):

Time (s):

Phase 4 - Final Drying

Speed (rpm):

Time (s):

⚙️ ENV CONTROL ⚙️

🌡️ TEMP

22.0°C

SP: °C

💧 RH

45%

SP: %

PID PARAMS

Kp: 4.0

Ki: 1.0

Kd: 0.0

⚙️ Simulation in progress...

Computing uniformity across 50 points...

Avg Thickness (µm)

Std Dev σ (µm)

CV% (%)

Min (µm)

Max (µm)

Uniformity (%)

100mm Wafer - 50-point grid (10 circles × 5 points)